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Measured and theoretical supersonic dynamic stability characteristics of a National Aero-Space Plane configuration

Measured and theoretical supersonic dynamic stability characteristics of a National Aero-Space Plane configuration...tests of a National Acro Space Plane configuration were conducted in the NASA Langley Unitary Plan Wind Tunnel (UPWT)...

Stars: 148 Updated: September 6th,2018

METHOD FOR CLEANING PHOTOMASKS USING MEGASONIC ENERGY

A method for cleaning photomasks is described, in which megasonic energy is introduced into a liquid on the surface of the photomask to be cleaned. In order to promote cleaning and to control cavitation events within the liquid, the l...

Stars: 69 Updated: September 6th,2018

Effects of Magnetic Fields on Mass Entrainment of Supermagnetosonic Jets

We have performed three-dimensional MHD equilibrium jet simulations that have been designed to excite the Kelvin-Helmholtz (K-H) instability and allow u...

Stars: 94 Updated: September 6th,2018

Effect of cleaning chemistry on MegaSonic damage

Acoustic energy applied through the cleaning media results into two kinds of cavitation effects; namely stable and transient cavitation. A uniformly pulsating bubble transforms into stable cavitation behavior whereas a bubble implosio...

Stars: 62 Updated: September 6th,2018

Controlling MegaSonic performance by optimizing cleaning media's physical and gaseous properties

As the feature size of the mask shrinks, the feature becomes more fragile and the potential for physical force damage during cleaning increases. At the ...

Stars: 130 Updated: September 6th,2018

10. Tomonaga and the Meson Theory

interpolatorisch tiber das Zwischengebiet mittelerer KopplungssUirken eineges zu enfahren."2J The essence of the strong coupling theory is to introduce a suitable unitary transformation U by which the original Hamiltonian is transfor...

Stars: 43 Updated: September 6th,2018

Controlling MegaSonic performance by optimizing cleaning media's physical and gaseous properties

As the feature size of the mask shrinks, the feature becomes more fragile and the potential for physical force damage during cleaning increases. At the ...

Stars: 130 Updated: September 6th,2018

Megasonic cleaning: effect of dissolved gas properties on cleaning

abstract Current and future lithography techniques require complex imaging improvement strategies. These imaging improvement strategies requir...

Stars: 86 Updated: September 6th,2018

Megasonic cleaning strategy for sub-10nm photomasks

One of the main challenges in photomask cleaning is balancing particle removal efficiency (PRE) with pattern damage control. To overcome this challenge,...

Stars: 66 Updated: September 6th,2018

Megasonic cleaning: possible solutions for 22nm node and beyond

Hrishi Shende ; Sherjang Singh ; James Baugh ; Raunak Mann ; Uwe Dietze ; Peter Dress; Megasonic cleaning: possible... Download citation file: RIS (Zotero) EndNote BibTex Medlars ProCite RefWorks Reference Manager Copyright © SPIE ...

Stars: 82 Updated: September 6th,2018

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